Leak detecting device

Details Leak detecting device Leak detecting device

2007-08-14

2007-08-14

Larkin, Daniel S. (Department: 2856)

Measuring and testing

With fluid pressure

Leakage

C073S040000

Reexamination Certificate

active

10558232

ABSTRACT:
A leak detecting device of the counterflow type includes a high vacuum pump having an inlet connected to a mass spectrometer. In addition, a prevacuum pump is provided having an inlet connected to an outlet of the high vacuum pump and a leak detecting device input. A connecting conduit is further provided between the leak detecting device input and an intermediate inlet of the high vacuum pump. A first valve of variable conductance is arranged in the course of the connecting conduit. Valves with a large inner diameter are expensive while valves with a small inner diameter show considerable resistance even in a fully opened state. A second valve arranged parallel to the first adjustable valve is provided in the course of the connecting conduit; thereby allowing the first and second valves to have relatively small inner diameters arranged in the connecting conduit, wherein the combined conductance of both opened valves is considerably increased.

REFERENCES:
patent: 4419882 (1983-12-01), Ishii et al.
patent: 5585548 (1996-12-01), Grosse Bley et al.
patent: 6415650 (2002-07-01), Bohm et al.
patent: WO 96/24828 (1996-08-01), None
patent: WO 01/46667 (2001-06-01), None

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