Leak detecting apparatus using compound turbo-molecular pump

Details Leak detecting apparatus using compound turbo-molecular pump Leak detecting apparatus using compound turbo-molecular pump

1995-06-06

1996-10-01

Noland, Thomas P.

Measuring and testing

With fluid pressure

Leakage

73 40, G01M 320

Patent

active

055612407

ABSTRACT:
A leak detecting apparatus using a compound turbo-molecular pump has an analyzer tube, an auxiliary vacuum pump such as a rotary pump connected to the analyzer tube by means of a passage with a compound turbo-molecular pump and a fore valve in between. An exhaust passage extends from a test port to be connected to an object of inspection. The exhaust passage is branched into a plurality of branched passages and each of the branched passages is connected to a position of different compression ratio of the compound turbo-molecular pump. A gate valve is disposed in each of the branched passages. There is connected to the exhaust passage a vacuum gauge which is in communication with each of the gate valves via a controller such that the gate valves are sequentially opened and closed by a signal from the controller in accordance with a change in pressure to be detected by the vacuum gauge.

REFERENCES:
patent: 4472962 (1984-09-01), Mennenga
patent: 4487058 (1984-12-01), Mennenga
patent: 4492110 (1985-01-01), Bergquist
patent: 4499752 (1985-02-01), Fruzzetti et al.
patent: 4550593 (1985-11-01), Reich
patent: 4735084 (1988-04-01), Fruzzetti
patent: 4773256 (1988-09-01), Saulgeot
patent: 4776207 (1988-10-01), Holme
patent: 4779449 (1988-10-01), Bley et al.
patent: 4919599 (1990-04-01), Reich et al.
patent: 5297422 (1994-03-01), Baret
patent: 5317900 (1994-06-01), Bergquist

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