Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1995-10-10
1996-10-08
Pham, Hoa Q.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
382146, 348126, G01B 1124
Patent
active
055637035
ABSTRACT:
An apparatus for and method of determining the coplanarity of leads of a semiconductor device is provided. The apparatus comprises a base (24) for placing the semiconductor device, and a plurality of mirrors (38) and (36) surrounding the base. The mirrors reflect an image of the leads of the semiconductor device to a camera. The camera records an image from which the lead coplanarity is determined. The base contains an optical datum (34) which provides a reference plane from which to measure coplanarity. The mirrors can be placed such that an off-axis image of the leads is reflected to the camera. The off-axis image improves the apparent sensitivity of the coplanarity measurement.
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Hopkins James E.
Lebeau Christopher J.
Bernstein Aaron B.
Chen George C.
Motorola Inc.
Pham Hoa Q.
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