LCD with gate and data lines formed of copper and an...

Details LCD with gate and data lines formed of copper and an... LCD with gate and data lines formed of copper and an...

2007-02-13

2007-02-13

Schechter, Andrew (Department: 2871)

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

C349S148000, C349S043000

Reexamination Certificate

active

10870212

ABSTRACT:
A method of fabricating a liquid crystal display device is provided. An aluminum alloy layer and a copper metal layer are sequentially formed on a substrate. A photoresist pattern is formed on the copper metal layer and the copper metal layer and the underlying aluminum alloy layer are etched to form a gate line. A gate insulating layer, an amorphous silicon layer and an impurity-doped amorphous silicon layer are deposited and then etched to form a semiconductor layer. An aluminum alloy layer and a copper metal layer are sequentially formed and etched on the structure to form a data line, a source electrode and a drain electrode. A passivation layer is formed and a contact hole and a pad opening are formed in the passivation layer. A transparent conductive thin film is deposited on this structure.

REFERENCES:
patent: 5739877 (1998-04-01), Onisawa et al.
patent: 6587164 (2003-07-01), Onisawa et al.
patent: 2004/0021804 (2004-02-01), Hong et al.
patent: 2004/0263706 (2004-12-01), Cho et al.
patent: 2005/0007511 (2005-01-01), Kim

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