Layered ultra-thin coherent structures used as electrical resist

Electrical resistors – Mechanically variable – Resistance value varied by removing or adding material

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338 9, 338314, 338320, H01C 1000

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044544952

ABSTRACT:
A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.

REFERENCES:
patent: 3896284 (1975-07-01), Holmes
patent: 4345236 (1982-08-01), Eichelberger et al.
Eckertova, "Physics of Thin Films," Plenum Press, New York, 1977, pp. 224-229.
Maissel et al., Handbook of Thin Film Technology, "Thin Film Resistors," McGraw-Hill, New York, Chapter 18, pp. 18-3-18-41, 1970.
I. K. Schuller et al., "Superconductivity and Magnetism in Metallic Superlattices," Argonne National Laboratory Publication, 1981, pp. 1-20.

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