Layered structures for optical reflectors

Details Layered structures for optical reflectors Layered structures for optical reflectors

2007-05-22

2007-05-22

Zimmerman, John J. (Department: 1775)

Stock material or miscellaneous articles

Composite

Of silicon containing

C428S698000, C359S848000, C359S868000

Reexamination Certificate

active

10826645

ABSTRACT:
Device of layered structures for optical reflectors and method for making the device. A device for providing environmental stability and mechanical integrity in space includes a substrate and a first silicon oxynitride layer on the substrate. The first silicon oxynitride layer has a tensile stress. Additionally, the device includes a second silicon oxynitride layer on the first silicon oxynitride layer. The second silicon oxynitride layer has a compressive stress.

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