Layer containing carbon and a method and apparatus for producing

Details Layer containing carbon and a method and apparatus for producing Layer containing carbon and a method and apparatus for producing

1984-07-19

1985-11-05

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192R, 204298, 428408, 4284111, 428489, 428490, 428491, C23C 1500

Patent

active

045512167

ABSTRACT:
A carbon-containing layer is produced on a substrate by means of sputtering. The carbon-containing layer is applied with good adhesion to nearly any substrate, is a very thin layer, and also exhibits a low conductivity. Parts of hydrocarbon molecules or hydrocarbon molecules are both incorporated into the carbon-containing layer during sputtering. The carbon-containing layer adheres well to nearly any substrate, is nearly scratch-proof, and helps avoid charging and contamination upon bombardment with charged particles.

REFERENCES:
patent: 3840451 (1974-10-01), Golyanov et al.
patent: 4173522 (1979-11-01), Pulker et al.
patent: 4223220 (1980-09-01), Feuerbaum
patent: 4228142 (1980-10-01), Holcombe et al.
patent: 4277679 (1981-07-01), Feuerbaum
patent: 4412903 (1983-11-01), Green et al.
patent: 4437962 (1984-03-01), Banks
Marinkovic et al., Carbon, 1976, vol. 14, #6, pp. 329-331.
Zelez, J. Vac. Sci. Technol., A-1, 1983, (Jun.), pp. 305-308.
Holland et al., Thin Solid Films, 48(1978), pp. L21-L23.

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