Lattice mismatched hetrostructure optical waveguide

Details Lattice mismatched hetrostructure optical waveguide Lattice mismatched hetrostructure optical waveguide

1988-08-26

1992-11-10

Chaudhuri, Olik

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

385130, 385131, 385123, G02P 610

Patent

active

051631180

ABSTRACT:
The invention comprises processes and heterostructure products defining silicon on insulator waveguides (80, 88, 90, 106, 112, 120, 122) that are suitable for use with light in the 1.3, 1.6 .mu.m or greater wavelengths. Silicon is deposited on an insulator layer 12 on a crystalline substrate 10 and grown or regrown in crystalline form. The silicon is then etched or formed into a waveguide structures.

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