Lattice matching measurement device

Details Lattice matching measurement device Lattice matching measurement device

1979-01-22

1980-08-19

Corbin, John K.

Optics: measuring and testing

Of light reflection

250571, 357 30, G01N 2155, H01L 2714

Patent

active

042181437

ABSTRACT:
A method of and apparatus for measuring lattice mismatch in a thin multilr semiconductor. By changing the voltage potential across a semiconductor, the different energy gaps present will absorb different frequencies of light. By shining monochromatic light of the frequency in question, a detector can observe the presence of such energy gaps by the absorption of the instant light intensity that will occur. The use of a Schottky barrier permits the light to be reflected back through the device a second time to maximize the absorption characteristics of energy gaps which may be present. Use of a substrate with known energy gaps permits broad band light to be scanned to determine the spectral components absorbed at each of the known energy gaps within the semiconductor.

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