Laterally sensitive accelerometer and method for making

Details Laterally sensitive accelerometer and method for making Laterally sensitive accelerometer and method for making

1992-08-10

1994-08-16

Woodiel, Donald O.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

29 7541, 3612831, G01P 1508, H01G 700

Patent

active

053376064

ABSTRACT:
A micromachined capacitor structure having a first anchor (12) attached to the substrate (24), a tether (13) coupled to the anchor (12) and having a portion free to move in a lateral direction over the substrate (24) in response to acceleration. A tie-bar (14) is coupled to the movable portion of the tether (13), and at least one movable capacitor plate (16) is coupled to the tie bar (13). A first fixed capacitor plate (16) is attached to the substrate (24) laterally overlapping and vertically spaced from the at least one movable capacitor plate (16).

REFERENCES:
patent: 4091680 (1978-05-01), Block
patent: 5181156 (1993-01-01), Gutteridge et al.

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