Laterally driven resonant microstructures

Details Laterally driven resonant microstructures Laterally driven resonant microstructures

1989-02-17

1991-06-18

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73517AV, H01G 700, G01P 1508

Patent

active

050253468

ABSTRACT:
A microbridge device for use as a sensor or an actuator is driven parallel to a substrate as a resonant microstructure. The microstructure comprises a stationary thin-film electrode secured to the substrate and located in a plane above it. A movable plate overlaying the substrate is suspended above it. The movable plate and electrode are patterned to provide for each at least one comb with fingers interdigitated with those of the other.

REFERENCES:
patent: 3221256 (1965-11-01), Walden
patent: 4030347 (1977-06-01), Norris et al.

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