Lateral varactor with staggered punch-through and method of fabr

Oscillators – Relaxation oscillators

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Details

357 13, 357 51, 357 15, 331117D, 331117V, H01L 2992

Patent

active

050558897

ABSTRACT:
A lateral varactor is fabricated with a recess structure that provides staggered punch-through points, enabling the varactor to be tuned through punch-through without significant non-linearities in either capacitance or Q. The lateral varactor (30) includes a cathode (32) and an anode (40) disposed on the surface of an active layer (12). The anode (40) includes a surface section (45), and a recess section (46) disposed within a recess area (50). This recess structure results in a greater active layer depth under the anode surface section (45) than under the anode recess section (46). As a result, as reverse-bias voltage on the anode increases, the depletion region (60) reaches punch-through under the anode recess section (46) prior to reaching punch-through under the anode surface section (45). As a result, varactor capacitance depends upon the contributions associated with each anode section and sidewall capacitance, so that the abrupt impedance changes caused by tuning the varactor through a punch-through point is reduced, and varactor tuning is made more continuous.

REFERENCES:
patent: 4458215 (1984-07-01), Huang et al.
patent: 4463322 (1984-07-01), Scott et al.
patent: 4481487 (1984-11-01), Brehm et al.
patent: 4642580 (1987-02-01), Scott

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