Pipes and tubular conduits – Flexible
Patent
1998-12-21
2000-05-23
Kashnikow, Andres
Pipes and tubular conduits
Flexible
138119, F16L 1100, F16L 1116
Patent
active
060654996
ABSTRACT:
An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly. The slide plate and the sliding seal subassembly provide a slidable vacuum-tight mating surface therebetween.
REFERENCES:
patent: 3106414 (1963-10-01), Peters et al.
patent: 3692337 (1972-09-01), Mischel
patent: 3770303 (1973-11-01), Hallett
patent: 3773087 (1973-11-01), Katayama
patent: 3915482 (1975-10-01), Fletcher et al.
patent: 3983402 (1976-09-01), Arndt, Jr. et al.
patent: 4072329 (1978-02-01), Mutchler
patent: 4383178 (1983-05-01), Shibata et al.
patent: 4781520 (1988-11-01), Balter
patent: 4791963 (1988-12-01), Gronert et al.
patent: 5195563 (1993-03-01), Brooks
patent: 5375854 (1994-12-01), Carlisle et al.
patent: 5656092 (1997-08-01), Blake et al.
Allen Ernest E.
Benveniste Victor M.
Justesen Perry J. I.
Pless Alexander F.
Rosen Gary J.
Eaton Corporation
Hwu Davis
Kashnikow Andres
Kastelic John A.
LandOfFree
Lateral stress relief mechanism for vacuum bellows does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lateral stress relief mechanism for vacuum bellows, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lateral stress relief mechanism for vacuum bellows will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1829995