Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1991-02-19
1993-08-03
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310322, 310358, 310365, 310366, H01L 4108
Patent
active
052332594
ABSTRACT:
This invention is a design for lateral field film bulk acoustic resonators (LF-FBAR). All electrodes in this design are located on one surface of the piezoelectric material, thereby simplifying manufacturing and improving performance. The gap between electrodes is limited to a specified dimension to maximize the efficiency of the device. Single and multi-pole devices are described. Barium magnesium fluoride and lithium niobate are specified as the piezoelectric material for high frequency applications.
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Adam John D.
Krishnaswamy S. Visvanathan
Walker John M.
Weinert Robert W.
Budd Mark O.
Dougherty Thomas M.
Maire David G.
Westinghouse Electric Corp.
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