Lateral bipolar transistor and FET

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Lateral bipolar transistor structure

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Details

257571, 257588, H01L 2900, H01L 27082, H01L 27102

Patent

active

055743064

ABSTRACT:
A lateral bipolar transistor and method of making the transistor are disclosed. The device is made by etching a trench around a central region of a semiconductor body. An emitter is buried beneath the surface of this central area and contact to it is made via a self-alignment technique. The collector region of the transistor is contacted through the floor of the trench while the base region of the transistor is contacted in a region that surrounds the trench. The described method is compatible with the simultaneous manufacture of FET devices on the same chip.

REFERENCES:
patent: 4743565 (1988-05-01), Goth et al.
patent: 4749661 (1988-06-01), Bower
patent: 5049964 (1991-09-01), Sakai et al.
patent: 5187109 (1993-02-01), Cook et al.

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