Laser with line narrowing output coupler

Details Laser with line narrowing output coupler Laser with line narrowing output coupler

1997-09-10

1998-12-22

Bovernick, Rodney

Coherent light generators

Particular resonant cavity

Specified output coupling device

H01S 308

Patent

active

058526277

ABSTRACT:
A laser having a line-narrowing output coupler. This output coupler reflects a portion of light generated in the gain medium and provides a spectral narrowing of that reflected light. A portion of the line narrowed beam is directed back into the gain medium for further amplification and a portion is transmitted as a part of the laser output. In a preferred embodiment, the laser is line narrowed in the rear as well as by the line narrowing output coupler.

REFERENCES:
patent: 5150370 (1992-09-01), Furuya et al.
patent: 5307358 (1994-04-01), Scheps
patent: 5404366 (1995-04-01), Wakabayashi et al.
patent: 5559816 (1996-09-01), Basting et al.
Littman, Michael G. and Metcalf, Harold J., "Spectrally narrow pulsed dye laser without beam expander", Applied Optics, vol. 17, No. 14, 15 Jul. 1978, pp. 2224-2227.
Loree, T. R., Butterfield, K.B. and Barker, D. L., "Spectral tuning of ArF and KrF discharge lasers" Appl. Phys. Lett., 32(3), 1 Feb. 1978, pp. 171-173.
Sengupta, Uday K., "Krypton fluoride excimer laser for advanced microlithography", Optical Engineering, Oct. 1993, vol. 32 No. 10, pp. 2410-2420.
Trebino, Rick, Roller, James P. and Siegman, Anthony E., "A Comparison of the Cassegrain and Other Beam Expanders in High-Power Pulsed Dye Lasers", IEEE Journal of Quantum Electronics, vol. QE-18(8), pp. 1208-1213 (Aug. 1982).

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