Coherent light generators – Particular component circuitry – Optical pumping
Patent
1997-01-09
1999-02-02
Lee, John D.
Coherent light generators
Particular component circuitry
Optical pumping
327323, 327325, 372 32, H01S 313
Patent
active
058675140
ABSTRACT:
An automatic gain control circuit in the feedback path for a laser wavelength control circuit is described herein. This gain control circuit automatically adjusts the amplification of the analog signals output from a photodetector array, where the array detects a fringe pattern created by a laser beam. Another feature of the preferred embodiment feedback circuit is the automatic setting of a DC offset voltage that compensates for errors in the feedback path and enables an accurate determination of a dark level signal in the fringe pattern signal. This dark level signal provides a reference for measuring the magnitude of the fringe pattern signal. Varying photodetector outputs may now be more accurately measured. The preferred embodiment feedback circuit also employs a very fast amplifier anti-saturation circuit using LED's connected in a clamp circuit.
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patent: 5095492 (1992-03-01), Sandstrom
patent: 5382786 (1995-01-01), Lovelace
patent: 5420877 (1995-05-01), Sandstrom
patent: 5450207 (1995-09-01), Fomenkov
patent: 5612529 (1997-03-01), Coleman
patent: 5663671 (1997-09-01), Steglich
Cymer Inc.
Lee John D.
Ogonowsky Brian D.
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