Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-07-10
2007-07-10
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S485000, C356S487000, C356S498000
Reexamination Certificate
active
11055547
ABSTRACT:
An optical system provides information about tangential vibration components of a surface at remote location. The optical system includes a light source assembly that emits first and second beams, each having one or more wavelengths and one or two polarizations. The first and second beams are directed to the interrogated surface. A detector system is positioned to detect a third beam formed by at least a portion of the first and second beams being reflected from the interrogated surface. The first, second and third beams having incident and reflection angles relative to the interrogated surface that do not lay in a same plane. The detector system positioned remotely from the interrogated surface, and providing information on a phase change in the third beam relative to the first and second beam. The phase change is indicative of at least one surface vibration vector component of the interrogated surface. The detector system is a 90 degree optical hybrid balanced detector with four photodiodes.
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Cho Pak Shing
Salamon Aviv
Shpantzer Isaac
Celight, Inc.
Richey Scott M
Toatley , Jr. Gregory J.
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