Laser transfer machining apparatus

Details Laser transfer machining apparatus Laser transfer machining apparatus

1997-09-22

1999-12-28

Nguyen, Thong

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

359 29, 359559, 359565, 359566, G02B 532, G02B 2746, G02B 2744, G03H 116

Patent

active

060089148

ABSTRACT:
The laser transfer machining apparatus comprises a shaping unit for shaping the laser beam so that the laser beam has a beam pattern which corresponds to a desired pattern to be machined in the object to be machined and a generating unit disposed separately from the shaping unit for simultaneously generating a plurality of laser beams each having the beam pattern from the laser beam shaped by the shaping unit. The generating unit is adapted to emit the plural laser beams while simultaneously defining a plurality of radiation directions of the generated plural laser beams to the object to be machined. The laser transfer machining apparatus can provide a high efficiency of utilization of light and reduce the time required for machining. Furthermore, the laser transfer machining apparatus can utilize a laser with a relatively low spatially coherence such as an eximer laser.

REFERENCES:
patent: 5029243 (1991-07-01), Dammann et al.
patent: 5124843 (1992-06-01), Leger et al.
patent: 5286963 (1994-02-01), Torigoe
patent: 5302798 (1994-04-01), Kaisha
Dammann et al. "High-Efficiency In-Line Multiple Imaging By Means of Multiple phase Holograms", Optics Communication vol. 3, No. 5. p. 312 (1971).
A. Engel, J. Steffen and G. Herziger "Laser Machining with Modulated Zone Plates" Applied Optics, Feb. 1974 pp. 269-273.
M. Ekberg, et al "Nd: YAG Laser Machining with Multilevel Resist Kinoforms" Applied Optics, Sep. 1991 pp. 3604-3607.

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