Laser template trimming of circuit elements

Details Laser template trimming of circuit elements Laser template trimming of circuit elements

1981-08-17

1983-02-15

Albritton, C. L.

Electric heating

Metal heating

By arc

219121LH, 338195, B23K 2700

Patent

active

043743145

ABSTRACT:
This invention relates to a method of trimming an element of an integrated circuit with a laser beam. A reflective, or otherwise optically opaque, template-like layer is placed over a portion of the circuit element to control the trimming operation. The laser beam is directed along the sharp edge of this layer in such a way that the maximum energy portion of the beam strikes a part of the circuit element, while low energy portions of the beam are prevented from reaching other parts of the element where they might adversely affect its characteristics.

REFERENCES:
patent: 3699649 (1972-10-01), McWilliams
patent: 4179310 (1979-12-01), Compton et al.

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