Coherent light generators – Particular resonant cavity – Unstable resonator
Patent
1994-11-17
1997-11-04
Bovernick, Rodney B.
Coherent light generators
Particular resonant cavity
Unstable resonator
372 99, 372101, H01S 308
Patent
active
056848226
ABSTRACT:
The resonator of the laser system employs a pair of anamorphic mirrors in combination with a pair of anamorphic lenses. The lenses are positioned between the mirrors on opposing ends of a laser resonator cavity. In one embodiment, both the mirrors and lenses have cylindrical cross-sections with the lenses oriented at ninety degrees from the mirrors. In use, a laser pulse is generated within a lasing cavity between the lenses and mirrors. The anamorphic configuration of the lenses and mirrors operates to minimize any differences between the vertical and horizontal divergence of the beam. Preferably, the beam consists of a sequence of individual pulses with the lenses and mirrors configured to ensure that differences in divergence are substantially eliminated after a selected number of laser pulse bounces. Method and apparatus embodiments are described herein.
REFERENCES:
patent: 4646314 (1987-02-01), Opower
patent: 4930138 (1990-05-01), Opower
patent: 5199042 (1993-03-01), Papetti et al.
patent: 5412681 (1995-05-01), Eisel et al.
Bovernick Rodney B.
Cymer Inc.
Wise Robert E.
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