Laser system with a micro-mechanically moved mirror

Details Laser system with a micro-mechanically moved mirror Laser system with a micro-mechanically moved mirror

1994-11-29

1996-11-05

Scott, Jr., Leon

Coherent light generators

Particular resonant cavity

Mirror support or alignment structure

372 99, 372 98, 372 92, 372108, H01S 308

Patent

active

055725430

ABSTRACT:
The invention provides a laser system with one or several micro-mechnically produced, actively controlled laser mirrors which are provided with an actuation device, so that the rapid manipulation of small laser mirrors is assured. The mirrors are designed so that they permit an economical production in large numbers.

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patent: 4954739 (1990-09-01), Sampsell
patent: 5200965 (1993-04-01), Okuyama et al.
patent: 5351264 (1994-09-01), Kato et al.
patent: 5357539 (1994-10-01), Otani et al.
patent: 5390211 (1995-02-01), Clark et al.
patent: 5418810 (1995-05-01), Eguchi et al.
Patent Abstract of Japan, JP61128588, Jun. 16, 1986, Abstract Published Oct. 28, 1986.
"Active Correction of a Thermal Lens in a Solid Laser. I. Metalmirro with a Controlled Curvature of the Central Region of hte Reflecting Surface," V. V. Apollonov, G. V., et al., 1991 American Institute of Physics, Sov. J. Quantum Elecron.21(1), Jan. 1991, pp. 116-118.
"Micromechanical Light Modular Array Fabricated on Silicon," K. E. Petersen, 1977 American Institute of Physics, vol. 32 No. 8, 15 Oct. 1977, pp. 521-523.

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