Laser system for recording data patterns on a planar substrate

Details Laser system for recording data patterns on a planar substrate Laser system for recording data patterns on a planar substrate

1991-12-12

1993-05-04

Healy, Brian

Coherent light generators

Particular beam control device

Optical output stabilization

372 9, 372 26, 372109, 346 76L, 346108, 359838, 359846, H01S 313, G01D 1510

Patent

active

052088189

ABSTRACT:
A processless phototool generator uses a pulsed excimer laser to image a deformable mirror spatial light modulator onto a thin ablateable coating on a quartz substrate. The light pulse ablates and clears the coating from selected areas according to the data pattern in the deformable mirror array. Exposure uniformity is enhanced by a two dimensional overwriting method. The high image reduction ratio enables high power densities on the substrate without exceeding the permissible power density on the deformable mirror array. Since the recording is processless (i.e. no development required) the generated image can be verified immediately after writing. The last feature is of particular importance in phase-shift masks.

REFERENCES:
patent: 4190327 (1980-02-01), Hughes
patent: 4441791 (1984-04-01), Hornbeck
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 5049901 (1991-09-01), Gelbart
patent: 5107275 (1992-04-01), Tsuruoka et al.

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