Laser system for functional trimming of films and devices

Electric heating – Metal heating – By arc

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

438799, B23K 2600

Patent

active

058082727

ABSTRACT:
A laser system (50) and processing method exploit a wavelength range (40) in which devices, including any semiconductor material-based devices (10) affected by conventional laser wavelengths and devices having light-sensitive or photo-electronic portions integrated into their circuits, can be effectively functionally trimmed without inducing performance drift or malfunctions in the processed devices. True measurement values of operational parameters of the devices can, therefore, be obtained without delay for device recovery, i.e., can be obtained substantially instantaneously with laser impingement. Accordingly, the present invention allows faster functional laser processing, eases geometric restrictions on circuit design, and facilitates production of denser and smaller devices.

REFERENCES:
patent: 4172741 (1979-10-01), Johnson
patent: 4182024 (1980-01-01), Cometta
patent: 4228528 (1980-10-01), Cenker et al.
patent: 4288776 (1981-09-01), Holmes
patent: 4399345 (1983-08-01), Lapham et al.
patent: 4598039 (1986-07-01), Fischer et al.
patent: 4656635 (1987-04-01), Baer et al.
patent: 4705698 (1987-11-01), Van Dine
patent: 4708747 (1987-11-01), O'Mara, Jr.
patent: 4731795 (1988-03-01), Clark et al.
patent: 4761786 (1988-08-01), Baer
patent: 4791631 (1988-12-01), Baumert et al.
patent: 4792779 (1988-12-01), Pond et al.
patent: 4810049 (1989-03-01), Fischer et al.
patent: 4853758 (1989-08-01), Fischer
patent: 4930901 (1990-06-01), Johnston et al.
patent: 4942582 (1990-07-01), Kintz et al.
patent: 4965803 (1990-10-01), Esterowitz et al.
patent: 4970369 (1990-11-01), Yamazaki et al.
patent: 4987286 (1991-01-01), Allen
patent: 5057664 (1991-10-01), Johnson et al.
patent: 5066998 (1991-11-01), Fischer et al.
patent: 5091991 (1992-02-01), Tulip et al.
patent: 5096850 (1992-03-01), Lippitt, III
patent: 5185291 (1993-02-01), Fischer et al.
patent: 5260963 (1993-11-01), Baird et al.
patent: 5265114 (1993-11-01), Sun et al.
patent: 5296674 (1994-03-01), Praschek et al.
patent: 5420515 (1995-05-01), Uhling et al.
patent: 5473624 (1995-12-01), Sun
patent: 5569398 (1996-10-01), Sun et al.
patent: 5611946 (1997-03-01), Leong et al.
patent: 5623449 (1997-04-01), Fischer et al.
1995 "Optimization of Memory Redundancy Laser Link Processing," Sun et al.
1995 "New Laser Technology Addresses the Yield Enhancement Challenge of the Evolving Generation of Memory Devices," Hutchens.
1993 "Application of a Binary Diffractive Optic for Beam Shaping in Semiconductor Processing by Lasers," Cordingley.
1991 "Focused Ion Beams," Orloff.
1990 "Polysilicon Resistor Trimming by Laser Link Making," Parker et al.
1989 "Reliability Aspects of Laser Programmable Redundancy: Infrared v. Green, Polysilicon v. Silicide," Chlipala & Scarfone.
1989 "Polycrystalline Silicon Resistor Trimming by Laser Annealing," Crowley.
1989 "Explosion of Poly-Silicide Links in Laser Programmable Redundancy for VLSI Memory Repair," Lu, Chipala, Scarfone.
1989 "Computer-Simulated Explosion of Poly-Silicide Links in Laser-Programmable Redundancy for VLSI Memory Repair," Chlipala, Scarfone.
1987 "Laser Processing for Application Specific Integrated Circuits (ASICs)," Smart & Stewart.
1986--Graphs of Absportance of A1, Pt, Ni, W v. Wavelengh.
1986 "Computer Simulation of Target Link Explosion in Laser Programmable Redundancy for Si Memory," Scarfone & Chlipala.
1984 "Consideration of Laser Material Interactions for the Trimming of Thin Film Resistors," Smart.
1983 "Laser Adjustment of Linear Monolithic Circuits," Litwin & Smart.
1982 "Semiconductor Processing Applications with Lasers," Kestenbaum.
1982 "Laser-Assisted Poly-Si Resistor Fuse Utilizing Silicon Lateral Flow," Iwai et al.
1981 "Laser Programmable Redundancy and Yield Improvement in a 64k DRAM," Smith et al.
1981 "Laser Beam Precessing," Cable.
1981 "A Technique for Automatic Focusing and Alignment of Monolithic Circuits for Laser Trimming, " Wells et al.
1980 "Photoexcitation Effects During Laser Trimming of Thin-Film Resistors on Si," Kestenbaum & Baer.
Sep. 1980 "Lasers in Semiconductor Processing," Burggraaf.
1979 "Reliability of LSI Memory Circuits Exposed to Laser Cutting," Rand.
1979 "Interference Effects in Laser Micromachining of Thin Films of Silicon," Kestenbaum.
1979 "A Fault-Tolerant 64k Dynamic Ram," Cenker et al.
1978 "Effects of Vapor Plasma on the Coupling of Laser Radiation with A1 Targets," Shui et al.
1978 "A Passive Laser-Trimming Technique to Improve the Linearity of a 10-bit D/A Converter," Price.
1977 "Laser Vaporization of Metal Films--Effect of Optical Interference in Underlying Dielectric Layers," North.
1976 "A Passive Laser-Trimming Technique to Improve D/A Linearity," Price.
1975 "Connections and Disconnections on Integrated Circuits Using Nanosecond Laser Pulses," Cook et al.
1974 "An Overview of Laser Functional Trimming Techniques," Hurtig & Swenson (ESI).
1974--"Algorithmic Trimming on Active Circuitry," Faber.
1965--Graph of Transmission & Absorption of Crystals & Glasses.
1988 "Laser Programming of Gallium Arsenide HFET Digital Integrated Circuits," Fischer.
1980 "Trimming Behavior and Post-Trim Characteristics of Ta.sub.2 N resistors on Silicon, " Kestenbaum and Baer.
1979 "Interference Effects in Laser Micromachining of Thin Films on Silicon," Kestenbaum.
1979 "A Fault-Tolerant 64k Dynamic Random-Access Memory," Cenker et al.
1976 "Laser Coding of Bipolar Read-Only Memories," North and Weick.
Dow et al., "Reducing Post-Trim Drift of Thin-Film Resistors by Optimizing YAG Laser Output Characteristics," IEEE Transactions on Components, Hybrids and Mfg. Technology, vol. Ch-1, No. 4, Dec. 1978, pp. 392-397.
Gillespie et al. Applied Optics, vol. IV, pp. 1488 (1985).
Jellison, Jr. G.E. et al., "Optical Properties of Heavily Doped Silicon Between 1.5 and 4.1 eV, " Physical Review Letters, vol. 46, No. 21., (May 1981), Pub. by The American Physical Society, pp. 1414-1417.
Chih-Youan Lu et al., IEEE, Transactions on Electron Devices, vol. 36, No. 6, pp. 1056-1061 (Jun. 1989).
Michael J. Mueller, "Functional Laser Trimming of Thin Film Resistors on Silicon ICs," SPIE vol. 611, Laser Processing of Semiconductors and Hybrids (1986), pp. 70-83.
SPIE, vol. 611, Laser Processing of Semiconductors and Hybrids (1986), pp. 12-13.
R. H. Wagner, "Functional Laser Trimming an Overview," Proceedings of SPIE--The International Society for Optical Engineering, vol. 611, 21-22 Jan. 1986, Los Angles, pp.8-17.
Weber, "Handbook of Laser Science and Technology," Optical Materials: Part II, CRC Press (Oct. 1986).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Laser system for functional trimming of films and devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser system for functional trimming of films and devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser system for functional trimming of films and devices will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-90792

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.