Electric heating – Metal heating – By arc
Patent
1994-10-20
1997-03-25
Leung, Philip H.
Electric heating
Metal heating
By arc
21912171, 21912185, 427555, 427597, 427 97, B23K 2600
Patent
active
056141149
ABSTRACT:
The output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light (62) for plating internal wall surfaces (79, 126) of vias (72, 74) in multilayered electronic devices (80). The parameters of the output pulses (62) are selected to facilitate substantially uniform deposition of plating material particles explosively vaporized from a substrate (124) onto the internal wall surface (79, 126). These parameters typically include at least two of the following criteria: high average power of greater than about 100 milliwatts measured over the beam spot area, a temporal pulse width shorter than about 100 nanoseconds, a spot diameter of less than about 50 microns, and a repetition rate of greater than about one kilohertz.
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Electro Scientific Industries Inc.
Leung Philip H.
Mills Gregory L.
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