Laser system and method for material processing with ultra...

Details Laser system and method for material processing with ultra... Laser system and method for material processing with ultra...

2005-12-27

2005-12-27

Evans, Geoffrey S. (Department: 1725)

Electric heating

Metal heating

By arc

C219S121680

Reexamination Certificate

active

06979798

ABSTRACT:
Laser system and method for material processing with ultra fast lasers are provided. One aspect of the invention features the method which removes at least a portion of a target structure such as a memory link while avoiding undesirable damage to adjacent non-target structures. The method includes applying a single ultra short laser pulse to the target structure to remove the target structure with the single pulse.

REFERENCES:
patent: 5208437 (1993-05-01), Miyauchi et al.
patent: 5235606 (1993-08-01), Mourou et al.
patent: 5656186 (1997-08-01), Mourou et al.
patent: 5720894 (1998-02-01), Neev et al.
patent: 5998759 (1999-12-01), Smart
patent: 6025256 (2000-02-01), Swenson et al.
patent: 6057180 (2000-05-01), Sun et al.
patent: 6150630 (2000-11-01), Perry
patent: 6208458 (2001-03-01), Galvanauskas et al.
patent: 6285002 (2001-09-01), Ngoi et al.
patent: 6286586 (2001-09-01), Cook
patent: 6297541 (2001-10-01), Ema et al.
patent: 6333485 (2001-12-01), Haight et al.
patent: RE37585 (2002-03-01), Mourou et al.
patent: 6621040 (2003-09-01), Perry et al.
patent: 6664163 (2003-12-01), Fujishima et al.
patent: 6664498 (2003-12-01), Forsman et al.
patent: 6717101 (2004-04-01), Morris et al.
patent: 6727458 (2004-04-01), Smart
patent: 2002/0003130 (2002-01-01), Sun et al.
patent: 0 902 474 (1999-03-01), None
Kruger, et al., Femtosecond-Pulse Laser Processing of Metallic and Semiconducting Thin Films, Proc. SPIE, vol. 2403, 1995, pp. 436-447.
Chichkov, et al., Femtosecond, Picosceond, and Nanosecond Laser Ablation of Solids, Applied Physics, A 63, 1996, pp. 109-115.
Stuart, et al., Ultrashort-Pulse Optical Damage, Proc. SPIE, vol. 2714, 1996, pp. 616-629.
Haight, et al., Implementation and Performance of a Femtosecond Laser Mask Repair System in Manufacturing, 1998, pp. 1-8.
Islam, et al., On Ultrashort Laser Pulse Machining, Technical Report, 1998.
Zhao, et al., Micromachining with Ultrashort Laser Pulses, Proc. SPIE, vol. 3618, 1999, pp. 114-121.
Zhu, et al., Influence of Laser Parameters and Material Properties on Micro-Drilling with Femtosceond Pulses, Applied Physics A69 (Suppl), 1999, 367-S371.
Tonshoff, et al., Micromachining Using Femtosecond Lasers, LPM 2000 Conference, Japan, Jun. 2000, pp. 1-15.
Perry, et al., Ultrashort-Pulse Laser Machining, LIA Handbook of Laser Materials Proceesing, Ed. In Chief Ready, Laser Institute of America, 2001, pp. 499-508.
Perry, et al., Ultrafast Lasers for Material Processing, LIA Handbook of Laser Materials Processing, Ed. In Chief Ready, Laser Institute of America, 2001, p. 82.
Liu, Xinbing, et al., Ultrashort Laser Pulses Tackle Precision Machining, Laser Focus World, Aug. 1997.
Jandeleit, J., et al., Picosceond Laser Ablation of Thin Copper Films, Applied Physics A 63, 1996, pp. 117-121.
Stuart, B.C., et al., Optical Ablation By High-Power Short-Pulse Lasers, Optical Society of America, vol. 13, No. 2, Feb. 1996, pp. 459-468.
Ameer-Beg, S., et al., Femtosecond Laser Microstructuring of Materials, Applied Surface Science 127-129, 1998, pp. 875-880.
Sucha, Gregg, Doped Optical Fibers Promise Compact Femtosecond Sources, Laser Focus World, 1998, pp. 1-4.
Nolte, S., et al., Ablation of Metals by Ultrasort Laser Pulses, Optical Society of America, B/vol. 10, Oct. 1997, pp. 2716-2722.
Kautek, Wolfgang, et al., Femtosecond Pulse Laser Ablation of Metallic, Semiconducting, Ceramic, and Biological Materials, SPIE vol. 2207, pp. 600-611.
Corkum, P.B., et al., Thermal Response of Metals to Ultrashort-Pulse Laser Excitation, The America Physical Society, Dec. 19, 1988, vol. 61, No. 25, pp. 2886-2889.
Liu, Hsiao-Hua, et al., Effects of Wavelength and Doping Concentration on Silicon Damage Threshold, pp. 1-2.
Korte, F., et al., Nanostructuring With Femtosecond Laser Pulses, CLEO, 2000, pp. 374.

Affiliated with

Also associated with

Rating

Laser system and method for material processing with ultra... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser system and method for material processing with ultra..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser system and method for material processing with ultra... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3512356