Coherent light generators – Particular active media – Gas
Reexamination Certificate
2007-10-30
2009-12-08
Nguyen, Dung T (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S055000, C372S094000
Reexamination Certificate
active
07630424
ABSTRACT:
A method/apparatus may comprise operating a line narrowed pulsed excimer or molecular fluorine gas discharge laser system by using a seed laser oscillator to produce an output which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module; a laser amplification stage which may comprise a ring power amplification stage; the method of operation may the steps of: selecting a differential timing between an electrical discharge between a pair of electrodes in the first laser chamber and in the second laser chamber which at the same time keeps ASE below a selected limit and the pulse energy of the laser system output light beam of pulses essentially constant.
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Brown Daniel J. W.
Ershov Alexander I.
Fomenkov Igor V.
Partlo William N.
Cymer Inc.
DiBerardino Law LLC
Nguyen Dung T
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