Laser scribing system and method

Details Laser scribing system and method Laser scribing system and method

1987-09-16

1989-08-29

Albritton, C. L.

Electric heating

Metal heating

By arc

21912173, B23K 2606

Patent

active

048619647

ABSTRACT:
A laser scribing system and method is described. In the system, a film formed on a substrate is irradiated with laser beam which is focused on a limited portion of the film in order to remove the portion and produce a groove. Laser beam used for eliminating the portion of film formed on a substrate is deprived of its border portion in advance of the focusing. Spherical aberration is suppressed due to this elimination.

REFERENCES:
patent: 4341565 (1982-07-01), Yaron et al.
patent: 4468551 (1984-08-01), Neiheisel
patent: 4713518 (1987-12-01), Yamazaki et al.

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