Laser scribing method

Details Laser scribing method Laser scribing method

1989-04-06

1990-11-13

Paschall, M. H.

Electric heating

Metal heating

By arc

21912169, 21912175, 1562728, 156627, B23K 2600

Patent

active

049703684

ABSTRACT:
In a method of making an electronic device having at least a transparent conductive layer, which includes at least a step of forming a transparent conductive layer member and a step of forming a transparent conductive layer by patterning the transparent conductive layer member using a spot-shaped or linear laser beam or beams, each of which has a short wavelength of 400 nm or less and optical energy greater than the optical energy band gap of the transparent conductive layer.

REFERENCES:
patent: 4069080 (1978-01-01), Osborne
patent: 4105468 (1978-08-01), Geshner et al.
patent: 4128752 (1978-12-01), Gravel
patent: 4181563 (1980-01-01), Miyaka et al.
patent: 4259367 (1981-03-01), Dougherty Jr.
patent: 4358659 (1982-11-01), Spohnheimier
patent: 4424435 (1984-01-01), Barnes, Jr.
patent: 4490211 (1984-12-01), Chen et al.

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