Laser scanner with amplitude and phase detection

Details Laser scanner with amplitude and phase detection Laser scanner with amplitude and phase detection

2007-10-23

2007-10-23

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

Having polarization

C356S512000

Reexamination Certificate

active

11002926

ABSTRACT:
A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.

REFERENCES:
patent: 4576479 (1986-03-01), Downs
patent: 5166751 (1992-11-01), Massig

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