Laser scanner with amplitude and phase detection

Details Laser scanner with amplitude and phase detection Laser scanner with amplitude and phase detection

2005-08-30

2005-08-30

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

Reexamination Certificate

active

06937343

ABSTRACT:
A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.

REFERENCES:
patent: 6052478 (2000-04-01), Wihl et al.
patent: 6118518 (2000-09-01), Hobbs
Anthony Vanderlught,Optical Signal Processing, John Wiley & Sons, New York, 1992, Chapters 9-10.

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