Optical: systems and elements – Compound lens system – Microscope
Reexamination Certificate
2011-03-08
2011-03-08
Nguyen, Thong (Department: 2872)
Optical: systems and elements
Compound lens system
Microscope
C359S385000
Reexamination Certificate
active
07903329
ABSTRACT:
Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a deflection system after light of unnecessary wavelength is removed by a filter. The deflection system is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.
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Aikawa Naoshi
Yoshida Yuki
Nguyen Thong
Nikon Corporation
Oliff & Berridg,e PLC
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