Laser scan confocal microscope

Optical: systems and elements – Compound lens system – Microscope

Reexamination Certificate

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C359S385000

Reexamination Certificate

active

07903329

ABSTRACT:
Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a deflection system after light of unnecessary wavelength is removed by a filter. The deflection system is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.

REFERENCES:
patent: 5323009 (1994-06-01), Harris
patent: 6108127 (2000-08-01), Atkinson
patent: 6204955 (2001-03-01), Chao et al.
patent: 2004/0032650 (2004-02-01), Lauer
patent: 2005/0018282 (2005-01-01), Riedmann
patent: 4-175713 (1992-06-01), None
patent: B2-3365884 (2003-01-01), None
patent: A-2005-043892 (2005-02-01), None
patent: A-2005-275199 (2005-10-01), None

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