Laser safe housing for a particle monitor in vacuum pump lines

Coherent light generators – Particular temperature control

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Details

372 43, 372103, H01S 304

Patent

active

051576783

ABSTRACT:
A housing for a laser based particle monitor comprising a pair of pipes for directing particle flow through a chamber. In one embodiment, elbows are disposed on the piping such that the interior of the chamber cannot be viewed from a point outside the housing.

REFERENCES:
patent: 4179194 (1979-12-01), Geller et al.
patent: 4834491 (1989-05-01), Aoki et al.
patent: 5065226 (1991-11-01), Kluitmans et al.

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