Laser-recrystallized diaphragm pressure sensor and method of mak

Details Laser-recrystallized diaphragm pressure sensor and method of mak Laser-recrystallized diaphragm pressure sensor and method of mak

1985-04-15

1986-06-03

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

29610SG, 338 4, 92103SD, G01L 708, G01L 906

Patent

active

045922381

ABSTRACT:
A pressure sensor includes a diaphragm and an overpressure stop, with a gap inbetween for displacement of the diaphragm in response to an applied pressure, the diaphragm being formed of laser-recrystallized polysilicon. Data extraction is accomplished either by depositing or forming four piezoresistors on the diaphragm and connecting them as the elements of a Wheatstone bridge circuit or by using the appropriately doped laser-recrystallized diaphragm as a piezoresistor itself.

REFERENCES:
patent: 3858150 (1974-12-01), Gurtler
patent: 4003127 (1977-01-01), Jaffe et al.
Binder et al., "Laser-Recrystallized Polysilicon Resistors . . . ", Sensors and Actuators, 4(1983) 527-536.
Guckel et al., "Planar Processed Polysilicon Sealed Cavities . . . ", Proc. of IEDM, 12-1984, pp. 223-225.

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