Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2005-08-23
2005-08-23
Lee, John R. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C378S119000
Reexamination Certificate
active
06933515
ABSTRACT:
An EUV radiation source (40) that includes a nozzle (42) positioned a far enough distance away from a target region (50) so that EUV radiation (56) generated at the target region (50) by a laser beam (54) impinging a target stream (46) emitted from the nozzle (42) is not significantly absorbed by target vapor proximate the nozzle (42). Also, the EUV radiation (56) does not significantly erode the nozzle (42) and contaminate source optics (34). In one embodiment, the nozzle (42) is more than 10 cm away from the target region (50).
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Fornaca Steven W.
Hartlove Jeffrey S.
Martos Fernando
McNaught Stuart J.
Michaelian Mark E.
Gurzo Paul M.
Lee John R.
Miller John A.
University of Central Florida Research Foundation
Warn, Hoffmann, Miller & LaLone, P.C.
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