Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2011-03-01
2011-03-01
Souw, Bernard E (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S493100, C250S492100
Reexamination Certificate
active
07897947
ABSTRACT:
A plasma generating system is disclosed having a source of target material droplets, e.g. tin droplets, and a laser, e.g. a pulsed CO2laser, producing a beam irradiating the droplets at an irradiation region, the plasma producing EUV radiation. For the device, the droplet source may comprise a fluid exiting an orifice and a sub-system producing a disturbance in the fluid which generates droplets having differing initial velocities causing at least some adjacent droplet pairs to coalesce together prior to reaching the irradiation region. In one implementation, the disturbance may comprise a frequency modulated disturbance waveform and in another implementation, the disturbance may comprise an amplitude modulated disturbance waveform.
REFERENCES:
patent: 4426031 (1984-01-01), Halasz
patent: 4828886 (1989-05-01), Hieber
patent: 4834637 (1989-05-01), Conta et al.
patent: 5171360 (1992-12-01), Orme et al.
patent: 5226948 (1993-07-01), Orme et al.
patent: 5259593 (1993-11-01), Orme et al.
patent: 5340090 (1994-08-01), Orme et al.
patent: 6549551 (2003-04-01), Ness et al.
patent: 6567450 (2003-05-01), Myers et al.
patent: 6625191 (2003-09-01), Knowles et al.
patent: 6693939 (2004-02-01), Klene et al.
patent: 6855943 (2005-02-01), Shields
patent: 6928093 (2005-08-01), Webb et al.
patent: 7067832 (2006-06-01), Mizoguchi et al.
patent: 7173267 (2007-02-01), Nakano
patent: 7378673 (2008-05-01), Bykanov et al.
patent: 7482609 (2009-01-01), Ershov et al.
patent: 7491954 (2009-02-01), Bykanov et al.
patent: 2003/0223546 (2003-12-01), McGregor et al.
patent: 2004/0238762 (2004-12-01), Mizoguchi et al.
patent: 2005/0259709 (2005-11-01), Das et al.
patent: 2006/0192153 (2006-08-01), Bykanov et al.
patent: 2006/0192154 (2006-08-01), Algots et al.
patent: 2006/0219957 (2006-10-01), Ershov et al.
patent: 2006/0249699 (2006-11-01), Bowering et al.
patent: 2006/0255298 (2006-11-01), Bykanov et al.
patent: 2007/0001130 (2007-01-01), Bykanov et al.
patent: 2007/0001131 (2007-01-01), Ershov et al.
patent: 2007/0170377 (2007-07-01), Nakano
patent: 2007/0228301 (2007-10-01), Nakano
patent: 2007/0237192 (2007-10-01), Das et al.
patent: 2007/0291350 (2007-12-01), Ershov et al.
patent: 2008/0043321 (2008-02-01), Bowering et al.
patent: 2008/0048133 (2008-02-01), Bykanov et al.
patent: 2008/0087847 (2008-04-01), Bykanov et al.
patent: 2008/0179548 (2008-07-01), Bykanov et al.
Orme & Muntz, “New technique for producing highly uniform droplet streams over an extended range of disturbance wavenumbers,” Rev. Sci. instrum. 58 (2), Feb. 1987, pp. 279-284.
Brenn & Lackermeire, “Drop formation from a vibrating orifice generator driven by modulated electrical signals,” Phys. Fluids 9 (12), Dec. 1997, pp. 3658-3669.
Orme & Muntz, “The manipulation of capillary stream breakup using amplitude-modulated disturbances: A pictorial and quantitative representation,” Phys. Fluids A 2 (7), Jul. 1990, pp. 1124-1140.
Orme, “On the genesis of droplet stream microspeed dispersions,” Phys. Fluids A 3 (12), Dec. 1991, pp. 2936-2947.
Orme, Willis & Nguyen, “Droplet patterns from capillary stream breakup,” Phys. Fluids A 5 (1), Jan. 1993, pp. 80-90.
Cymer Inc.
Hillman Matthew K.
Smyth Andrew
Souw Bernard E
LandOfFree
Laser produced plasma EUV light source having a droplet... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Laser produced plasma EUV light source having a droplet..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser produced plasma EUV light source having a droplet... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2728386