Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2006-02-21
2009-10-06
Wells, Nikita (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S492200
Reexamination Certificate
active
07598509
ABSTRACT:
An EUV light source is disclosed that may include a laser source, e.g. CO2laser, a plasma chamber, and a beam delivery system for passing a laser beam from the laser source into the plasma chamber. Embodiments are disclosed which may include one or more of the following; a bypass line may be provided to establish fluid communication between the plasma chamber and the auxiliary chamber, a focusing optic, e.g. mirror, for focusing the laser beam to a focal spot in the plasma chamber, a steering optic for steering the laser beam focal spot in the plasma chamber, and an optical arrangement for adjusting focal power.
REFERENCES:
patent: 2759106 (1956-08-01), Wolter
patent: 3150483 (1964-09-01), Mayfield et al.
patent: 3232046 (1966-02-01), Meyer
patent: 3279176 (1966-10-01), Boden
patent: 3746870 (1973-07-01), Demarest
patent: 3960473 (1976-06-01), Harris
patent: 3961197 (1976-06-01), Dawson
patent: 3969628 (1976-07-01), Roberts et al.
patent: 4042848 (1977-08-01), Lee
patent: 4088966 (1978-05-01), Samis
patent: 4143275 (1979-03-01), Mallozzi et al.
patent: 4162160 (1979-07-01), Witter
patent: 4203393 (1980-05-01), Giardini
patent: 4223279 (1980-09-01), Bradford, Jr. et al.
patent: 4364342 (1982-12-01), Asik
patent: 4369758 (1983-01-01), Endo
patent: 4455658 (1984-06-01), Sutter et al.
patent: 4504964 (1985-03-01), Cartz et al.
patent: 4507588 (1985-03-01), Asmussen et al.
patent: 4534035 (1985-08-01), Long
patent: 4536884 (1985-08-01), Weiss et al.
patent: 4538291 (1985-08-01), Iwamatsu
patent: 4550408 (1985-10-01), Karning et al.
patent: 4561406 (1985-12-01), Ward
patent: 4596030 (1986-06-01), Herziger et al.
patent: 4618971 (1986-10-01), Weiss et al.
patent: 4626193 (1986-12-01), Gann
patent: 4633492 (1986-12-01), Weiss et al.
patent: 4635282 (1987-01-01), Okada et al.
patent: 4751723 (1988-06-01), Gupta et al.
patent: 4752946 (1988-06-01), Gupta et al.
patent: 4774914 (1988-10-01), Ward
patent: 4837794 (1989-06-01), Riordan et al.
patent: 4891820 (1990-01-01), Rando et al.
patent: 4928020 (1990-05-01), Birx et al.
patent: 4959840 (1990-09-01), Akins et al.
patent: 5005180 (1991-04-01), Edelman et al.
patent: 5023884 (1991-06-01), Akins et al.
patent: 5023897 (1991-06-01), Neff et al.
patent: 5025445 (1991-06-01), Anderson et al.
patent: 5025446 (1991-06-01), Kuizenga
patent: 5027076 (1991-06-01), Horsley et al.
patent: 5070513 (1991-12-01), Letardi
patent: 5102776 (1992-04-01), Hammer et al.
patent: 5126638 (1992-06-01), Dethlefsen
patent: 5142166 (1992-08-01), Birx
patent: 5175755 (1992-12-01), Kumakhov
patent: 5189678 (1993-02-01), Ball et al.
patent: 5313481 (1994-05-01), Cook et al.
patent: 5315611 (1994-05-01), Ball et al.
patent: 5319695 (1994-06-01), Itoh et al.
patent: 5359620 (1994-10-01), Akins
patent: RE34806 (1994-12-01), Cann
patent: 5411224 (1995-05-01), Dearman et al.
patent: 5448580 (1995-09-01), Birx et al.
patent: 5471965 (1995-12-01), Kapich
patent: 5504795 (1996-04-01), McGeoch
patent: 5729562 (1998-03-01), Birx et al.
patent: 5763930 (1998-06-01), Partlo
patent: 5852621 (1998-12-01), Sandstrom
patent: 5856991 (1999-01-01), Ershov
patent: 5863017 (1999-01-01), Larson et al.
patent: 5866871 (1999-02-01), Birx
patent: 5936988 (1999-08-01), Partlo et al.
patent: 5953360 (1999-09-01), Vitruk et al.
patent: 5963616 (1999-10-01), Silfvast et al.
patent: 5970076 (1999-10-01), Hamada
patent: 5978394 (1999-11-01), Newman et al.
patent: 5991324 (1999-11-01), Knowles et al.
patent: 6005879 (1999-12-01), Sandstrom et al.
patent: 6016325 (2000-01-01), Ness et al.
patent: 6018537 (2000-01-01), Hofmann et al.
patent: 6028880 (2000-02-01), Carlesi et al.
patent: 6031241 (2000-02-01), Silfvast et al.
patent: 6031598 (2000-02-01), Tichenor et al.
patent: 6039850 (2000-03-01), Schulz
patent: 6051841 (2000-04-01), Partlo
patent: 6064072 (2000-05-01), Partlo et al.
patent: 6067311 (2000-05-01), Morton et al.
patent: 6094448 (2000-07-01), Fomenkov et al.
patent: 6104735 (2000-08-01), Webb
patent: 6128323 (2000-10-01), Myers et al.
patent: 6151346 (2000-11-01), Partlo et al.
patent: 6151349 (2000-11-01), Gong et al.
patent: 6164116 (2000-12-01), Rice et al.
patent: 6172324 (2001-01-01), Birx
patent: 6192064 (2001-02-01), Algots et al.
patent: 6195272 (2001-02-01), Pascente
patent: 6208674 (2001-03-01), Webb et al.
patent: 6208675 (2001-03-01), Webb
patent: 6219368 (2001-04-01), Govorkov
patent: 6240117 (2001-05-01), Gong et al.
patent: 6285743 (2001-09-01), Kondo et al.
patent: 6304630 (2001-10-01), Bisschops et al.
patent: 6307913 (2001-10-01), Foster et al.
patent: 6317448 (2001-11-01), Das et al.
patent: 6359922 (2002-03-01), Partlo et al.
patent: 6370174 (2002-04-01), Onkels et al.
patent: 6377651 (2002-04-01), Richardson et al.
patent: 6381257 (2002-04-01), Ershov et al.
patent: 6392743 (2002-05-01), Zambon et al.
patent: 6396900 (2002-05-01), Barbee, Jr. et al.
patent: 6404784 (2002-06-01), Komine
patent: 6414979 (2002-07-01), Ujazdowski et al.
patent: 6442181 (2002-08-01), Oliver et al.
patent: 6452194 (2002-09-01), Bijkerk et al.
patent: 6452199 (2002-09-01), Partlo et al.
patent: 6466602 (2002-10-01), Fleurov et al.
patent: 6477193 (2002-11-01), Oliver et al.
patent: 6493374 (2002-12-01), Fomenkov et al.
patent: 6493423 (2002-12-01), Bisschops
patent: 6529531 (2003-03-01), Everage et al.
patent: 6532247 (2003-03-01), Spangler et al.
patent: 6535531 (2003-03-01), Smith et al.
patent: 6538257 (2003-03-01), Bisschops
patent: 6538737 (2003-03-01), Sandstrom et al.
patent: 6541786 (2003-04-01), Partlo et al.
patent: 6549551 (2003-04-01), Ness et al.
patent: 6566667 (2003-05-01), Partlo et al.
patent: 6566668 (2003-05-01), Rauch et al.
patent: 6567450 (2003-05-01), Myers et al.
patent: 6576912 (2003-06-01), Visser et al.
patent: 6580517 (2003-06-01), Lokai et al.
patent: 6584132 (2003-06-01), Morton
patent: 6586757 (2003-07-01), Melnychuk et al.
patent: 6590922 (2003-07-01), Onkels et al.
patent: 6590959 (2003-07-01), Kandaka et al.
patent: 6618421 (2003-09-01), Das et al.
patent: 6621846 (2003-09-01), Sandstrom et al.
patent: 6625191 (2003-09-01), Knowles et al.
patent: 6647086 (2003-11-01), Amemiya et al.
patent: 6671294 (2003-12-01), Kroyan et al.
patent: 6721340 (2004-04-01), Fomenkov et al.
patent: 6744060 (2004-06-01), Ness et al.
patent: 6753534 (2004-06-01), Novak et al.
patent: 6757316 (2004-06-01), Newman et al.
patent: 6782031 (2004-08-01), Hofmann et al.
patent: 6795474 (2004-09-01), Partlo et al.
patent: 6804327 (2004-10-01), Schriever et al.
patent: 6815700 (2004-11-01), Melnychuk et al.
patent: 6822251 (2004-11-01), Arenberg et al.
patent: 6865255 (2005-03-01), Richardson
patent: 6891172 (2005-05-01), Ohgushi et al.
patent: 6894298 (2005-05-01), Ahmad et al.
patent: 6904073 (2005-06-01), Yager et al.
patent: 6985508 (2006-01-01), Knowles et al.
patent: 7247870 (2007-07-01), Ershov et al.
patent: 7274435 (2007-09-01), Hiura et al.
patent: 2002/0041368 (2002-04-01), Ota et al.
patent: 2002/0114370 (2002-08-01), Onkels et al.
patent: 2003/0184720 (2003-10-01), Heerens et al.
patent: 2003/0223541 (2003-12-01), Petach et al.
patent: 2004/0183038 (2004-09-01), Hiramoto et al.
patent: 2004/0209411 (2004-10-01), Fisher et al.
patent: 2005/0199829 (2005-09-01), Partlo et al.
patent: 2005/0205810 (2005-09-01), Akins et al.
patent: 2006/0131515 (2006-06-01), Partlo et al.
patent: 2007/0029512 (2007-02-01), Bowering et al.
patent: 2008/0087847 (2008-04-01), Bykanov et al.
patent: 06-053594 (1994-02-01), None
patent: 2000-058944 (2000-02-01), None
patent: 200091096 (2000-03-01), None
patent: WO2004/104707 (2004-12-01), None
U.S. Appl. No. 11/358,983, filed Feb. 21, 2006, Bykanov et al.
U.S. Appl. No. 11/358,988, filed Feb. 21, 2006, Bykanov et al.
U.S. Appl. No. 60/775,442, filed Feb. 21, 2006, Bowering et al.
Andreev et al., “Enhancement of laser/EUV conversion by shaped laser pulse interacting with Li-contained targets for EUV lithography,” Proc. of SPIE 5196:128-136 (2004).
Apruzese, “X-ray laser reearch using z pinches,” Am. Inst. Of Phys. 399-403 (1994).
Bollanti et al., “Compact three electrodes excimer laser Ianus for a POPA optical
Bowering Norbert
Ershov Alexander I.
Hansson Bjorn
Partlo William N.
Cymer Inc.
Hillman Matthew K.
Smith II Johnnie L
Wells Nikita
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