Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2011-04-19
2011-04-19
Johnston, Phillip A (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C372S025000, C372S055000
Reexamination Certificate
active
07928416
ABSTRACT:
An EUV light source is disclosed which may comprise a plurality of targets, e.g., tin droplets, and a system generating pre-pulses and main-pulses with the pre-pulses for irradiating targets to produce expanded targets. The system may further comprise a continuously pumped laser device generating the main pulses with the main pulses for irradiating expanded targets to produce a burst of EUV light pulses. The system may also have a controller varying at least one pre-pulse parameter during the burst of EUV light pulses. In addition, the EUV light source may also include an instrument measuring an intensity of at least one EUV light pulse within a burst of EUV light pulses and providing a feedback signal to the controller to vary at least one pre-pulse parameter during the burst of EUV light pulses to produce a burst of EUV pulses having a pre-selected dose.
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Cymer Inc.
Hillman Matthew K.
Johnston Phillip A
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