Laser processing method for a thin-film structure

Details Laser processing method for a thin-film structure Laser processing method for a thin-film structure

1992-09-18

1994-03-22

Albritton, C. L.

Electric heating

Metal heating

By arc

21912168, B23K 2700

Patent

active

052966747

ABSTRACT:
A method for eroding material, particularly material in a thin-film structure, that includes at least one thin-film arranged over at least one transparent layer, includes irradiating the thin-film with a laser pulse through the transparent layer. The laser pulse has a wavelength in the absorption region of the thin-film. The irradiated thin-film region, together with any layers lying above the thin-film region, are popped off, without any residue, from the transparent layer.

REFERENCES:
patent: 3560258 (1971-02-01), Brisbane
patent: 3637410 (1972-01-01), Stevens
patent: 4190759 (1980-02-01), Hongo et al.
patent: 4504726 (1985-03-01), Hosakai et al.
patent: 4705698 (1987-11-01), Van Dine

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