Laser processing method and laser processing apparatus

Details Laser processing method and laser processing apparatus Laser processing method and laser processing apparatus

2011-03-15

2011-03-15

Bolda, Eric (Department: 3663)

Optical: systems and elements

Single channel simultaneously to or from plural channels

C359S333000, C359S626000, C372S006000, C372S009000

Reexamination Certificate

active

07907341

ABSTRACT:
The present invention relates to a laser processing method and laser processing apparatus for enabling improvement and maintenance of homogenization of a beam intensity distribution in an irradiated region. The laser processing apparatus comprises, at least, an ASE light generation section for emitting ASE light, and a homogenizer for splitting the ASE light into multiple beams. The ASE generation section for emitting the ASE light as processing laser light is provided, and whereby the deterioration of homogenization due to inter-beam interference is suppressed. The homogenization of beam intensity distribution is improved by locating a condenser lens relative to an object such that the object is shifted from a focus position of the condenser lens in the homogenizer, by intentionally deteriorating a beam quality M2of the ASE light itself emitted from the ASE light generation section to about 2 to 10, or by a combination of these, in laser processing.

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