Laser processing method and apparatus

Details Laser processing method and apparatus Laser processing method and apparatus

2006-01-31

2006-01-31

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C250S559300

Reexamination Certificate

active

06992274

ABSTRACT:
There is disclosed a laser processing method including moving a mask and a work with respect to each other while emitting a pulse laser a plurality of times, and moving the mask and the work with respect to each other to form respective laser irradiated regions disposed adjacent to one another by irradiating the work with the pulse laser transmitted through openings formed in positions different from one another on the mask, so that boundaries of the laser irradiated regions disposed adjacent to each other contact at least each other.

REFERENCES:
patent: 5491534 (1996-02-01), Shiozawa
patent: 2001/0001745 (2001-05-01), Im et al.
patent: 2001/0045974 (2001-11-01), Shoemaker et al.
patent: 2002/0192572 (2002-12-01), Lau
patent: 2003/0000930 (2003-01-01), Hamada
patent: 56-137546 (1981-10-01), None
patent: 58-39012 (1983-03-01), None
patent: 3-204986 (2001-09-01), None

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