Laser processing method

Details Laser processing method Laser processing method

1995-12-21

1997-11-25

Walberg, Teresa J.

Electric heating

Metal heating

By arc

21912171, 21912182, 21912183, 21912185, B23K 2608

Patent

active

056908466

ABSTRACT:
A laser processing method is to be executed by a pair of turning mirrors of which axes of rotation are arranged in mutually twisted positions, a flat field lens for converging a laser beam reflected on the pair of turning mirrors on a specified plane, and an X-Y stage which carries and moves thereon an object to be processed to which the laser beam is applied, the object having a plurality of rectangular planar areas of the same shape as each other in a matrix form and adjoining the rectangular planar areas while not overlapping the rectangular planer area nor leaving any space therebetween. The method includes a first step of executing application of the laser beam of which a laser applying position is determined by the pair of turning mirrors and the flat field lens to one of the rectangular planar areas of the object, a second step of moving an X-axis stage or a Y-axis stage of the X-Y stage after the first step is completed, a third step of executing application of the laser beam to one of the rectangular planar areas which is adjacent to the rectangular planar area to which the latest application of the laser beam is performed, and a fourth step of executing the second and third steps alternately to process the plurality of rectangular planar areas of the object.

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patent: 4685775 (1987-08-01), Goodman
patent: 4769523 (1988-09-01), Tanimoto et al.
patent: 4918284 (1990-04-01), Weisz
patent: 4941082 (1990-07-01), Pailthorp et al.
patent: 5329090 (1994-07-01), Woelki et al.

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