Laser processing method

Details Laser processing method Laser processing method

1993-10-20

1996-07-02

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Control of pulse characteristics

372 7, 372109, H01S 310

Patent

active

055330401

ABSTRACT:
Method of processing, e.g., laser annealing, objects such as semiconductor devices with pulsed lasers with high production yield and high reproducibility so as to obtain good characteristics stably. The pulse width of the irradiated pulse beam is set to more than 30 nsec to stabilize the processing. To achieve a pulse width exceeding 30 nsec, plural lasers are connected in series or in parallel and excited successively.

REFERENCES:
patent: 4375685 (1983-03-01), LeGoff et al.
patent: 4547883 (1985-10-01), Cohn et al.
patent: 4606034 (1986-08-01), Eden et al.

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