Laser processing device

Details Laser processing device Laser processing device

1995-08-29

1997-11-18

Hellner, Mark

Optics: measuring and testing

Range or remote distance finding

With photodetection

2191216, 21912185, B23K 2600, G01C 308

Patent

active

056893272

ABSTRACT:
A laser processing device for collecting a laser beam from laser beam radiating means using an objective lens and irradiating a surface of a sample with the collected laser beam to form a fine pattern thereon is disclosed. The device comprises a uniform pellicle film having high transmittance to wavelength of the laser beam and provided between the objective lens and the surface of the sample. The laser beam radiated from the laser beam radiating means passes through a shutter and a beam expander, and is reflected by a dichroic mirror. The laser beam is then collected by the objective lens and passes through the pellicle film to be radiated on the surface of the sample. Thus, laser processing may be carried out without deteriorating performance of the objective lens.

REFERENCES:
patent: 4464413 (1984-08-01), Murphy et al.
patent: 4720621 (1988-01-01), Langen
patent: 4769523 (1988-09-01), Tanimoto et al.
patent: 5239552 (1993-08-01), Okuyama et al.
patent: 5449882 (1995-09-01), Black et al.
patent: 5576125 (1996-11-01), Bih

Affiliated with

Also associated with

Rating

Laser processing device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser processing device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser processing device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1569424