Laser processing apparatus, mask for laser processing, and...

Electric heating – Metal heating – By arc

Reexamination Certificate

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Details

C219S121680

Reexamination Certificate

active

06906282

ABSTRACT:
A mask10comprises a mask member layer12having a laser processing pattern and comprising a metallic material and first and second substrate members11and13holding the mask member on two faces thereof and comprising a material that transmits laser light.

REFERENCES:
patent: 4887283 (1989-12-01), Hosono
patent: 5313043 (1994-05-01), Yamagishi
patent: 5887520 (1999-03-01), Kinoshita
patent: 6211485 (2001-04-01), Burgess
patent: 6303196 (2001-10-01), Funatsu
patent: 64-047551 (1989-02-01), None
patent: 8-76357 (1996-03-01), None

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