Electric heating – Metal heating – By arc
Reexamination Certificate
2011-01-04
2011-01-04
Heinrich, Samuel M (Department: 3742)
Electric heating
Metal heating
By arc
C219S121690, C219S121840
Reexamination Certificate
active
07863542
ABSTRACT:
A laser processing apparatus is provided. The laser processing apparatus is for performing pattern processing of a transparent conductive film that is formed on a multilayer film on a substrate by using laser light, includes debris extraction module having a vortex generation mechanism that generates a vortex flow by directing gas into the vicinity of a laser-irradiated portion of the transparent conductive film. The debris extraction module is disposed close to the substrate, and debris before deposition and after deposition on the substrate, which is generated by laser irradiation, is entrapped into the vortex flow to be extracted to the outside with the gas.
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Aso Kosei
Murase Hidehisa
Sasaki Yoshinari
Yamada Naoki
Exitech Limited
Heinrich Samuel M
K&L Gates LLP
Sony Corporation
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