Laser processing apparatus and laser processing method

Details Laser processing apparatus and laser processing method Laser processing apparatus and laser processing method

2005-11-17

2010-10-05

Elve, M. Alexandra (Department: 3742)

Electric heating

Metal heating

By arc

C219S121720, C219S121780

Reexamination Certificate

active

07807940

ABSTRACT:
A laser processing apparatus, in accordance with at least one exemplary embodiment, is configured to contemporaneously perform the functions of observing a surface of a substrate and concentrating laser light to a given position inside the substrate. The laser processing apparatus can include an optical system having an afocal optical subsystem configured to concentrate laser light inside the substrate. Adjustment of the position of a laser light concentrating point can be achieved independent of adjustment of a focal point by the automatic focusing mechanism to observe the surface of the substrate irradiated with laser light.

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