Laser processing apparatus

Details Laser processing apparatus Laser processing apparatus

1987-01-09

1988-09-06

Albritton, C. L.

Electric heating

Metal heating

By arc

21912162, 21912176, 21912182, 21912183, 356400, 356401, B23K 2600

Patent

active

047695234

ABSTRACT:
A laser processing apparatus for projecting a spot of laser beam onto a portion of a microcircuit pattern on a semiconductor wafer, photographic mask or the like to cut the lead or anneal the limited area. The laser processing apparatus includes a mark detector for detecting the positions of first marks preliminarily provided on a work as the relative positions to the detection centers of the mark detector itself, a controller for controlling a processing energy beam generator so as to form on the work second marks detectable by the mark detector, and an error detector responsive to the results of the position detection of the second marks by the mark detector so as to detect relative positional errors between the focussing centers of the energy beam on the work and the detection centers of the mark detector.

REFERENCES:
patent: 4371264 (1983-02-01), Lacombat et al.
patent: 4402610 (1983-09-01), Lacombat
patent: 4566795 (1986-01-01), Matsuura et al.
patent: 4573791 (1986-03-01), Phillips
patent: 4577958 (1986-03-01), Phillips

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