Laser processing apparatus

Details Laser processing apparatus Laser processing apparatus

2009-05-15

2011-12-06

Elve, M. Alexandra (Department: 3742)

Electric heating

Metal heating

By arc

C219S121690, C219S121760, C219S121830

Reexamination Certificate

active

08071910

ABSTRACT:
A laser processing apparatus is provided with a first laser oscillator for laser CVD and a second laser oscillator for laser repair in a laser oscillation section. Either one of the first or second laser beam is irradiated by switching the first and second laser oscillators by a laser oscillator switch portion of a main body section. An optical path forming member is disposed such that the first or second laser beam, whichever is irradiated, will take the same optical path and reach a sample, after passing a common slit, to perform laser processing on the sample. Further, an objective lens is configured to be switched to an objective lens having a magnification corresponding to a wavelength of the laser beam irradiated from the laser oscillation section by an objective lens switch section of an objective lens section.

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