Electric heating – Metal heating – By arc
Reexamination Certificate
2005-06-28
2005-06-28
Elve, M. Alexandra (Department: 1725)
Electric heating
Metal heating
By arc
C219S121680
Reexamination Certificate
active
06911622
ABSTRACT:
The invention provides a system and method for vaporizing a target structure on a substrate. According to the invention, a calculation is performed, as a function of wavelength, of an incident beam energy necessary to deposit unit energy in the target structure. Then, for the incident beam energy, the energy expected to be deposited in the substrate as a function of wavelength is calculated. A wavelength is identified that corresponds to a relatively low value of the energy expected to be deposited in the substrate, the low value being substantially less than a value of the energy expected to be deposited in the substrate at a higher wavelength. A laser system is provided configured to produce a laser output at the wavelength corresponding to the relatively low value of the energy expected to be deposited in the substrate. The laser output is directed at the target structure on the substrate at the wavelength corresponding to the relatively low value of the energy expected to be deposited in the substrate, in order to vaporize the target structure.
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Cordingley James
Lauer William
Plotkin Michael
Smart Donald Victor
Trepagnier Pierre
Elve M. Alexandra
Fish & Richardson P.C.
General Scanning Inc.
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